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차세대 ULSI interconnection을 위한 CVD 저유전율 박막 개발
Yun-Hae Kim, Hyeong-Jun Kim
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Article
Ceramist 2001;4(1):5-13.
Published online February 28, 2001.
Yun-Hae Kim
,
Hyeong-Jun Kim
차세대 ULSI interconnection을 위한 CVD 저유전율 박막 개발
김윤해, 김형준
서울대학교 재료공학부 & 반도체공동연구소
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