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MEMS 기술을 이용한 접촉연소식 가연성 가스센서
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Ceramist 2005;8(4):40-44.
Published online August 31, 2005.
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MEMS 기술을 이용한 접촉연소식 가연성 가스센서
한치환, 한상도
한국에너지기술연구원, 센서소재연구센터
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