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Ceramist 2006;9(6):24-29.
Published online December 31, 2006.
Ceramic Coating by Electron Beam PVD for Nanos-Tructure Control
Hideaki Matsbara
Japan Fine Ceramics Center
나노구조 제어를 위한 EB-PVD법에 의반 세라믹스 코팅
마쯔바라 히데아기
Abstract
Electron beam physical vapor deposition (EB-PVD) process has currently been applied to thermal barrier coatings (TBCs) for aircraft engines. Due to unique columnar structure, EB-PVD TBCs have advantages in resistances to thermal shock and thermal cycle for their applications, compared to films prepared by plasma spray By the EB-PVD equipment, we successfully obtained yttria-stabilized zirconia (YSZ) layer which has columnar and feather like structure including a large amount of nano size pores and gaps. The EB-PVD technique has been developed for coating functional perovskite type oxides such as (La, Sr)MnO3. Electrode properties have been improved by interface and structural control.
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