Analytical Techniques of X-ray Photoelectron Spectroscopy and the Application to Nano-scaled Thin Films

Review

Ceramist 2007;10(5):74-85.
Published online October 31, 2007.

¹
²

XPS 분석 기술과 나노 박막에의 응용

박형호¹, 양준규², 최선규¹

¹연세대학교 신소재공학부
²삼성전자

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