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전자싸이클로트론공명플라즈마 화학기상증착법에 의한 PZT 박막의 증착 및 전기적 특성 연구
Su-Ok Jeong, Won-Jong Lee
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Ceramist 2000;3(1):45-52.
Published online February 28, 2000.
Su-Ok Jeong
,
Won-Jong Lee
전자싸이클로트론공명플라즈마 화학기상증착법에 의한 PZT 박막의 증착 및 전기적 특성 연구
정수옥, 이원종
한국과학기술원 재료공학과
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